Si doping superlattice structure on 6H-SiC(0001)
نویسندگان
چکیده
منابع مشابه
Photoelectric Properties of Si Doping Superlattice Structure on 6H-SiC(0001)
The energy-band structure and visible photoelectric properties of a p/n-Si doping superlattice structure (DSL) on 6H-SiC were simulated by Silvaco-TCAD. The,n the Si-DSL structures with 40 nm-p-Si/50 nm-n-Si multilayers were successfully prepared on 6H-SiC(0001) Si-face by chemical vapor deposition. TEM characterizations of the p/n-Si DSL confirmed the epitaxial growth of the Si films with pref...
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ژورنال
عنوان ژورنال: MATEC Web of Conferences
سال: 2017
ISSN: 2261-236X
DOI: 10.1051/matecconf/201713008004